Vacuum valves with an electromechanical drive ECQ with orifices 25, 63 and 100 mm are designed to seal vacuum systems in a range of operating pressures from 1 10-5 to 1,07 105 Pa (7,5 10-8 to 800 mm Hg . cent.).
Valves are consist of a body with two connecting flanges, bellows seal, insulating vacuum cavity of the valve from the atmosphere. For ease stroke rod is mounted on two bearings. One end of the rod with trapezoidal thread is screwed into the nut bellows unit, the other - with the help of the coupling is connected to the motor shaft.